Provision of a Wafer Level Electroplating Unit

The Zepler Institute (ZI), University of Southampton, plans to purchase a wafer level-electroplating tool for use in state of the art wafer scale fabrication research. The tool is intended to perform Back-end-of-line wafer fabrication processes and research including the fabrication of interconnects and Through Silicon Vias. Additional uses of the tool to undertake wafer scale packaging processes is highly desirable.

The fabrication facility offers industry-compatible fabrication processing including 150mm and 200mm wafer processing and the tool needs to offer comparable plating performance to commercial foundry processes. The tool is not required to provide fully automated or high volume throughput and processing can be undertaken on a single wafer-by-wafer basis. There is no current requirement for wafer loading from wafer carriers. The tool is not intended for continuous operations and will have periods of idle or standby.

Additional information: This tender will be conducted electronically and tender documents can be downloaded from the web portal (In-Tend) provided earlier in this notice. https://in-tendhost.co.uk/universityofsouthampton.

If you are not already registered as a supplier with the In-Tend Portal, you will need to register before accessing the tender documents.

Once you have logged in as a supplier, click on current tenders and locate the tender documents by clicking on the reference number detailed in section IV.3.1 of this notice. Further instructions for the submission of tender are below. (Please note, to preserve the integrity of the tendering procedure, all queries must made be via In-Tend).

To submit your return, please follow the instructions below:

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Due to the nature of this requirement it was not deemed suitable to be split into lots.

In accordance with Regulation 50, paragraph (2) of the Public Contracts Regulations 2015 and subject to Article 5 and Annex 5, Part D (13) of Directive 2014/24/EU of the European Parliament and of the Council, the University intend to publish the contract value at contract award stage, and reserved the right to do so. By submitting a tender response tenderers are consenting to publication of this information unless otherwise agreed in advance with the University.

Is a Recurrent Procurement Type? : No