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Supply of one off Reactive Ion Etcher (RIE) and/or a one off Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) in two lots.

UNIVERSITY OF SHEFFIELD Published 26 Sept 2023 Find a Tender

key details

Value£560,000
Statuscomplete
Category (CPV) 38000000 +1 more
RegionYorkshire and the Humber
Deadline4 Jan 2023
Procedureopen
OCIDocds-h6vhtk-038941

Awards (2)

This procurement was awarded to 2 suppliers. Values shown are per-award; the notice total is £560,000.

description

The Device Fabrication Small Research Facility (SRF) currently has one reactive ion etcher (RIE) and two inductively coupled plasma reactive ion etchers (ICPRIE), serving a wide range

of research and industrial customers from across the University and nationally. The SRF is capable of manufacturing Semiconductor devices via a range of standard processes, working alongside our Epitaxy facility growing advanced semiconductor materials. Our research portfolio in these areas is in excess of £50million.

The RIE and ICP equipment is fundamental to device fabrication, and we are planning to expand our capacity to meet increasing demand and to improve customer service. Quotations are required for 1 off of each RIE and ICP, in two separate lots, with the

specifications detailed within the tender document. The likelihood is that only one item will be purchased, hence the title of this exercise being on an and/or basis

documents

Documents are linked, not mirrored. They are served by the publishing authority and may require registration.

notice history

8 notices published against this procurement.

PublishedTypeRegimeNotice
27 May 2022 Contract notice (F02) Earlier regulations 014877-2022
27 May 2022 Tender (tender) · 669b054c-07d9-4ac2-8965-8b0696c245f0-542211
29 Nov 2022 Contract notice (F02) Earlier regulations 033832-2022
3 Jan 2023 Corrigendum (F14) Earlier regulations 000055-2023
3 Jan 2023 Tender amendment (tenderAmendment) · f93d582e-8c75-40c8-a3aa-8f0e529affc1-602422
26 Sept 2023 Modification notice (F20) Earlier regulations 028404-2023
26 Sept 2023 Contract award notice (F03) Earlier regulations 028386-2023
27 Sept 2023 Award (award) · a4b96b70-595e-4d48-ab2e-8ff7d77b90f5-683808

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source

Published on Find a Tender. Contact details for named individuals are not reproduced on this site.