Provision of a 200mm High Performance Electron Beam Lithography System
key details
| Value | £5,000,000 |
|---|---|
| Status | complete |
| Category (CPV) | 38000000 |
| Region | South East |
| Deadline | 28 Sept 2022 |
| Procedure | open |
| OCID | ocds-h6vhtk-036266 |
Award
| Supplier | Value | Date | Status |
|---|---|---|---|
| JEOL (UK) LTD | · | · | active |
description
The University is looking to procure a new 200mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide state-of-the-art nanometer scale lithography service.
notice history
4 notices published against this procurement.
| Published | Type | Regime | Notice |
|---|---|---|---|
| 24 Aug 2022 | Contract notice (F02) | Earlier regulations | 023589-2022 |
| 20 Sept 2022 | Corrigendum (F14) | Earlier regulations | 026245-2022 |
| 11 Oct 2022 | Corrigendum (F14) | Earlier regulations | 028592-2022 |
| 17 Jan 2023 | Contract award notice (F03) | Earlier regulations | 001468-2023 |
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source
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