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200mm High Performance Electron Beam Lithography System

UNIVERSITY OF SOUTHAMPTON Published 24 Aug 2022 Contracts Finder

key details

Value£5,000,000
Statuscomplete
Category (CPV) 38000000
Deadline19 Oct 2022
Contract start18 Nov 2022
Contract end17 Nov 2038
Procedureopen
SME suitableYes
OCIDocds-b5fd17-fb32f4cc-f9ec-43b5-a8d4-e0d4c5c3ed8d

Award

SupplierValueDateStatus
JEOL(U.K.)LIMITED £3,138,991 22 Dec 2022 active

description

The University is looking to procure a new 200mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide a state-of-the-art nanometer scale lithography service. The user base for the new instrument will be approximately 40 users.

Tenders or requests to participate must be submitted electronically via the University's electronic tendering portal, In Tend, found at the following address: https://in-tendhost.co.uk/universityofsouthampton/aspx/home

documents

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notice history

1 notice published against this procurement.

PublishedTypeRegimeNotice
17 Jan 2023 Award (award) · 87b0e3e1-b635-4fca-a263-efa9d6e43c24-606450

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