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2741 Ion Miller - University of Leeds

The University Of Leeds Published 8 Dec 2016 Contracts Finder

key details

Statuscomplete
Category (CPV) 38000000
RegionYorkshire and the Humber
Deadline11 Jan 2017
Contract start1 Mar 2017
Contract end28 Feb 2018
Procedureopen
SME suitableYes
OCIDocds-b5fd17-f37d92c7-4426-429a-9781-cdc61d06e3d7

Award

SupplierValueDateStatus
SCIA SYSTEMS GMBH £442,500 20 Mar 2017 active

description

The School of Electronic and Electrical Engineering at the University of Leeds is seeking tenders for a ion-beam miller / etcher, specifically aimed at etching GMR and other magnetic stacks, alongside III-V semiconductor and quartz etching capabilities, on a wafer size of 100 mm diameter, and on part-pieces mounted on a 100-mm carrier. The etcher must: be compatible with reactive gases including Cl2, O2 and CF4; have a sample load lock; and have He-backside cooling capabilities (including MFC control). The system will be used for research and should offer flexibility of use.

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notice history

1 notice published against this procurement.

PublishedTypeRegimeNotice
20 Mar 2017 Award (award) · adfa592b-78cb-4ed3-b1ce-1aebd397f6b8-136581

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