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Provision of a 300mm Capable High Throughput Electron Beam Lithography System

UNIVERSITY OF SOUTHAMPTON Published 12 Dec 2022 Contracts Finder

key details

Value£7,000,000
Statuscomplete
Category (CPV) 38000000
RegionSouth East
Deadline18 Jul 2022
Procedureopen
OCIDocds-h6vhtk-0347a3

Awards (2)

This procurement was awarded to 2 suppliers. Values shown are per-award; the notice total is £7,000,000.

SupplierValueDateStatus
JEOL(U.K.)LIMITED £7,461,509 8 Nov 2022 active
JEOL (UK) LTD · · active

description

The University is looking to procure a new 300mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide state-of-the-art nanometer scale lithography service.

notice history

4 notices published against this procurement.

PublishedTypeRegimeNotice
17 Jun 2022 Contract notice (F02) Earlier regulations 016638-2022
5 Jul 2022 Corrigendum (F14) Earlier regulations 018355-2022
12 Dec 2022 Contract award notice (F03) Earlier regulations 035010-2022
12 Dec 2022 Award (award) · 4f9eacd1-5a66-4358-a96e-1b111d3961d2-597835

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source

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