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202122/547 Supply of up to four dry etch and deposition systems

University of Leeds Published 24 Aug 2023 Contracts Finder

key details

Value£25,000,000
Statuscomplete
Category (CPV) 22520000
RegionYorkshire and the Humber
Deadline16 Mar 2022
Procedureselective
OCIDocds-h6vhtk-031776

Awards (2)

This procurement was awarded to 1 suppliers. Values shown are per-award; the notice total is £25,000,000.

SupplierValueDateStatus
Oxford Instruments £2,155,581 25 May 2023 active
Oxford Instruments · · active

description

NOTICE OF AWARD OF four dry etch and deposition systems, specifically: •A Deep-Silicon Reactive Ion Etcher (D-RIE) •An Inductively Coupled Plasma-RIE (ICP-RIE) •A parallel plate RIE •A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)

documents

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notice history

3 notices published against this procurement.

PublishedTypeRegimeNotice
15 Feb 2022 Contract notice (F02) Earlier regulations 004314-2022
24 Aug 2023 Contract award notice (F03) Earlier regulations 024931-2023
24 Aug 2023 Award (award) · 6a5458b9-7ef6-49e4-9dbe-c720d599dc0d-674848

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source

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